OLED 1 페이지

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  TM CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  L/L CHAMBER (Load Lock)

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + LM Guide
  Chamber Material	SUS304(EP)

   

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  PASSAGE CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  MASK STOCK/ BUFFER CHAMBER

   

  ITEM	SPECIFICATION
  Glass Size	Gen2.0 ~ Gen8.5
  Pass Line	TBD
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Up/Down	SUS Ball Screw + Lm Guide
  Chamber Material	SUS304(EP)

   

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  FLIP CHAMBER

   

  ITEM	SPECIFICATION
  Base Pressure	7.42E-7 Torr
  Leak Rate	≤ 0.1mTorr/min(10min)
  Tact Time	90sec
  Pump	DRY Pump + Cryo Pump
  Drive	Z-axis Moving, Flip