Buffer Chamber
페이지 정보
작성자 관리자 작성일19-05-28 10:53 조회445회 댓글0건관련링크
본문
• Characteristic and advantage
- Chuck & Glass, Mask transfer by Roller
- Buffer after aligner
• Range of application
- N2 Process, Low/High Vac Process
• Main function
- Glass can be stored in 20-layer cassette
- Vacuum pumping, Vent for Chamber vacuum control
- Pressure dectection thruogh vacuum gauge
